摘要
真空紫外空阴极光源是一种稳定的气体放电光源,工作气体为He、Ne、Ar、N_2、H_2、CO等,工作气压10torr～10^(-2)torr,工作电流100mA～400mA,能在20～200nm波段产生丰富的原子和离子谱线,光谱辐射稳定性优于±1％。
VUV Hollow Cathode Source is a stable gaseous discharge source.The operating characteristics of the source and it's spect- ral output with various gases, such as He, Ne, Ar, N_2, H_2, and CO, are presented.The discharge current varies between 100 mA and 400 mA and the operating pressure varies between 10 torr and 0.01 torr. The source can product rich atomic and ionic lines between 20 nm and 200 nm. The stability of spectral radiation is better than ±1%/1hour.
出处
《光学机械》
CSCD
1989年第6期10-16,共7页
