摘要
介绍了我们研制的多功能显微物镜波差测定仪的各种像差测定方法。测试了国内外显微物镜。平视场物镜的波面像差、轴上〈λ/4~λ/8,视场边缘~λ/2;非平场的波面像差、轴上〈λ/4,边缘视场~3λ。波面像差作为设计装配检测是一种合适的质量判据。作为像质判据,采用白光传递函数较为合适。
This article describes the test method of various aberrations usirg mult- ifunction interferometer for microscope objective.We have measured various kinds of objectives made at home and abroad.The wave aberration on- axis is〈λ/4,but the wave aberrations at the full view field are∽λ/2 and 3λ for plane and non-plane apochromatic objective respectively.Wave aberration is a good quality criterion availablet for optical design.White light OTF is a good image guality criterion for image evaluation.
出处
《光学机械》
CSCD
1989年第3期1-9,共9页