摘要
在显微物镜的成象光路中,增加一块振荡反射镜,使被测线宽的放大象相对窄缝扫描,将光学边界信息转变为梯形电脉冲。经过电路处理。得到两个尖形电脉冲。填充高频矩形脉冲测量两尖形脉冲之间的时间间隔,进而求得被测线宽的宽度。推导了被测线宽与光学性能参数,结构参数,振荡频率以及高频矩形脉冲数之间的函数关系式。根据显微镜的基本性能,分析了影响测量误差的各种因素,并进行实例计算。最后提出一个框图,说明线宽测量仪系统中各功能之间的关系。
Bying adding an oscillator mirror in the imaging path, thus the enlarged image will be scanned by the narrower slit,and the optical boundary information is converted into gradient electrical pulse. when the pulse is processed by the circuit, two sharp electrical pulses are obtained. The temporal space tween two sharp pulses is measured by filling high-frequency rectangular pulse, then the measured linewidth can be obtained. Functional relations between measured linewidth and optical parameters, structural parameters, oscillator coil and high-frequency rectangular pulse numbers have been derived in the paper. According to the basic properties of the microscope, all kinds of factors effecting measuring errors are analyzed and calculated. In the end a block diagram is proposed, it shows the relations in different functions of the linewidth measuring instrument system.
出处
《光学工程》
CSCD
1989年第6期6-12,共7页
