摘要
为了比较真实地测量出圆光栅直径误差φi及刻线位置误差θi,本文指出了对被测盘信号进行差放处理的必要性。从理论进行了分析,并用实验进行了验证。
In order to check out circular grating diameter error φ_i and scaled line position error θ_i,the paper points out the necessity of differential and enlarging processing for signal of measured disk theoretically, and is examined in experiment.
出处
《光学工程》
CSCD
1989年第5期44-50,共7页
