摘要
通过溶胶－凝胶工艺制得具有良好湿敏特性的LiCl／SiO2－Al2O3薄膜材料，利用XRD和AFM对这类薄膜进行了结构表征．结果表明，具有纳米分相结构的薄膜在全湿范围内阻抗值的变化＞3个数量级，阻抗的对数值与相对湿度的关系具有较好的线性度，吸湿响应＜30s，脱湿响应＜60s．
LiCl/SiO2-Al2O3 films with good humidity sensing properties were prepared by sol-gel process. The film structure was investigated by using XRD and AFM. The results indicated that the impedance variety of the film with nano-phase separation structure was more than 3 order of magnitude, and there was a better linear relationship between logarithmic impedance and relative humidity; the moisture absorption response and dehydration response of this film were less than 30s and 60s respectively.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1999年第6期995-999,共5页
Journal of Inorganic Materials
