摘要
分析了半导体光电探测器光谱响应度的测试原理; 研制了一套波长为0.4~1.1 μm 的光谱响应度测试装置。该装置采用双光路替代法, 可以测试绝对光谱响应度、相对光谱响应度和量子效率, 并可减小光源不稳定性对测试结果的影响, 最终给出了测试结果比对。
The testing of spectral responsivity of semiconductor photo detector is discussed. A device used for testing spectral responsivity with wavelength ranged from 0.4~1.1 μm is developed. It can be used to test relative spectral responsivity, absolute spectral responsivity and quantum efficiency, and the effect of instability of source can be eliminated. The testing results are compared.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1999年第11期1581-1584,共4页
Acta Optica Sinica
关键词
相对光谱
响应度
绝对光谱
光电探测器
测试
relative spectral response, absolute spectral response, quantum efficiency, monochromater.