摘要
研制一种在光子嫩肤仪中用于产生标准谱段的滤光片。采用石英作为基底,选择TiO2和SiO2作为高低折射率材料,采用needle优化方法压缩通带波纹,通过真空镀膜和离子辅助的技术,研制出了200 nm～550 nm平均透过率低于0.3%5、70 nm～1 200 nm平均透过率高于95%的光子嫩肤用滤光片。在制备过程中,解决了TiO2的吸收问题和薄膜厚度控制的问题;通过多次实验,分析了波长漂移产生的原因并提出可行方法。
A filter for producing the standard spectrum band in photorejuvvenation device was developed.Quartz was selected as the substrate,TiO2 and SiO2 were chosen as high and low refractive index film materials.The needle optimizing method was used to eliminate the ripple.By using vacuum depositing method with ion-assisted deposition system,the filter with average transmittance less than 0.3% in 200 nm～550 nm and over 95% in 570 nm～1200 nm was achieved.In the process of evaporating,an improved monitoring method was used to reduce the absorption of TiO2 and the film thickness error.Based on repeated experiments,the reason of wavelength shift was analyzed and the feasible method for solving the problem was put forward.
出处
《应用光学》
CAS
CSCD
北大核心
2011年第3期557-561,共5页
Journal of Applied Optics
关键词
光子嫩肤
滤光片
离子辅助沉积
photorejuvenation
filter
ion-assisted deposition
