摘要
介绍了荷能团簇飞行时间质谱仪的原理及其在荷能团簇碰撞沉积装置中的物理设计。对实验中出现的若干问题进行了探讨，并提出了解决的措施。
The principle and physical design of the time-of-flight mass spectrometerequipped in the energetic cluster impact deposition apparatus are introduced. Someproblems existed in experiments and their solutions are also discussed.
出处
《核技术》
CAS
CSCD
北大核心
1999年第12期717-719,共3页
Nuclear Techniques
关键词
飞行时间质谱仪
荷能团簇
碰撞沉积
物理设计
Time-of-flight, Energetic cluster impact deposition, Physical design
