摘要
作者研究了溅射过程中在辉光等离子体内导入氮对溅射TiC膜在钢基体上附着力的影响。采用自制划痕仪测定了膜的附着力,並用俄歇谱仪研究了膜与基体的界面。结果表明,反应气体N_2能够促使形成一个渐变的过渡界面,从而改善了TiC膜在钢基体上的附着力。本文还讨论了辉光等离子体与基体表面的相互作用。
Introducing nitrigen into glow discharge pJasma during deposition process to improve the adhesion of sputtered TiC coating to steel substrate was investigated. The adhesion strength was measured by both scratch method and indentation test. The interface composition was determined by means of Auger spectro-scope. The results show that the reactive gas N2 increases the adhesion of TiC coating to steel substrate, because of a graded interface existing between coating and substrate. The interaction of discharge plasma with the surface of substrate was discussed .
出处
《固体润滑》
CSCD
北大核心
1989年第1期30-33,共4页
