摘要
描述了非线性回归模型在 Ｔｉ Ｏ２ 薄膜的光学常数及其厚度测量中的应用．利用薄膜在可见光范围内的光谱特性使用曲线拟合技术对它的光学常数进行了测量．研究结果表明，这种方法可以简单、高效地应用于对薄膜厚度及其光学常数的测量．
In this paper, a nonlinear regression model is utilized to measure the optical constants of TiO 2 thin film. We measured the optical constants by fitting the visible transmission spectra. The results suggest that this method can be applied to estimate optical constants, such as dispersion refractive index, thickness and absorption coefficient effectively for its versatility.
出处
《东南大学学报（自然科学版）》
EI
CAS
CSCD
1999年第5期105-108,共4页
Journal of Southeast University：Natural Science Edition
