摘要
采用超声喷雾热分解技术（USP）,以二水醋酸锌（Zn（CH3COO）2.2H2O）为原材料,在无碱玻璃衬底上制备了ZnO薄膜。对前驱液pH值、ZnO薄膜结构特性、表面形貌、电学和光学特性的研究结果表明,冰乙酸对ZnO薄膜生长速率具有重要影响。X射线衍射（XRD）和扫描电子显微镜（SEM）测试显示,所有样品均未六角纤锌矿结构,呈（002）晶面择优生长;当冰乙酸掺入量大于0.02及其以上工艺条件时,获得的薄膜具有六角片状表面形貌;ZnO薄膜电阻率可达到10-1Ω.cm,同时在400~2 000 nm的宽谱范围内的透过率能够达到80%以上。
The ZnO thin films were fabricated on corning eagle 2 000 substrate by ultrasonic spray pyrolysis（USP）.The zinc acetate dehydrate was used as source material.By investigating the pH of the initial solution,the structure,surface morphology,electrical and optical properties of the ZnO thin films,it is found that the acetic acid has great effect on the growth rate of ZnO thin films.According to XRD and SEM test results,all samples we obtained are hexagonal wurtzite structure oriented in the（002） crystallographic direction.When the acetic acid/zinc acetate is more than 0.02,the ZnO thin films show hexagonal platy surface morphology.The ZnO thin films have the resistivity of 10^-1 Ω·cm,and the total transmittance is above 80% in the wide wavelength region from 400 nm to 2 000 nm.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2011年第4期540-544,共5页
Journal of Optoelectronics·Laser
基金
国家高技术研究发展规划资助项目(2007AA05Z436
2009AA050602)
国家重点基础研究发展规划资助项目(2011CB201605
2011CB201606)
国家自然科学基金资助项目(60976051)
科技部国际合作重点资助项目(2006DFA62390
2009DFA62580)
教育部新世纪人才资助项目(NCET-08-0295)
天津科技支撑资助项目(08ZCKFGX03500)
