摘要
建立了制造用高功率激光器光束质量的评价体系与测量方法,研究了该体系所采用的评价参数、测量原理、测量方法、测量仪器以及测量结果的计算和分析方法。首先,对目前存在的评价激光光束质量的参数进行了比较和判断。接着,以光束传输比(M2)和光束参数积(Kf)为重点,阐述了光束质量评价参数与光束束宽定义之间的关系,提出了工业应用背景下光束质量的评价参数。最后,介绍了基于实测目的的光束质量测量方法和实际测量结果。测量结果显示,DC035Slab CO2激光器的Kf值为3.78 mm.mrad,TLF6000tCO2激光器的Kf值为8.67 mm.mrad,表明Kf值是评价制造用高功率激光器光束质量的较为合适的参数。由于该值是在实际光束传输路径上不同位置处对光束束宽进行测量后用双曲线方法拟合得到的结果,所以更好地反映了高功率激光束的传输和聚焦性能,诠释了激光制造系统的制造能力。
The evaluation and measurement of the beam quality for a high power manufacturing laser were established based on modern laser manufacturing.The measuring parameters,measuring principle,method,equipment and calculation were investigated.Firstly,based on the parameter analysis on distinguishing the laser beam quality at present,the relationship between beam quality and beam width was discussed by taking the beam propagation ratio（M^2）and beam parameter product（Kf） for examples.Then,the proper parameters were proposed.Finally,a method based on the object of actual measurement and results were introduced.Experimental results indicate that the Kf value of DC035Slab CO2 laser and TLF6000tCO2 laser are 3.78 mm·mrad and 8.67 mm·mrad,respectively.It is concluded that the Kf value is the calculation results of hyperbolic fitting based on the actual measurement of beam radius at different positions along the laser beam propagating direction,the capability and focus ability of high power laser propagation can be reflected better,which defines well the laser performance for manufacturing systems.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2011年第2期297-303,共7页
Optics and Precision Engineering
基金
国家973重点基础研究发展规划资助项目(No.2006CB605206-3)
北京市教委科技计划资助项目(No.JC101012200903)
关键词
激光制造
光束质量
光束束宽
空心探针
laser manufacturing
beam quality
beam width
hollow needle
