摘要
本文分析了MARK50型蒸发台常见的高压、发射电流和电子柬斑故障现象,并从维修的经验方面进行分析,给出了每种现象的检查和维修方法。
The trouble of MARK 50 Evaporator system about high--voltage, Emission current and electron beam spot is analyzed in this paper. The methods of inspection and maintenance about trouble are given from maintenance experience.
出处
《中国材料科技与设备》
2011年第1期82-84,共3页
Chinese Materials Science Technology & Equipment
关键词
高压
电流
电子柬斑
High voltage
Current
Electron beam