摘要
改良西门子法多晶硅生产工艺会产生大量的四氯化硅有害气体,为了减少对环境污染,降低生产成本,需要对四氯化硅进行合理利用。通过氢化手段将四氯化硅转化为三氯氢硅能使四氯化硅得到合理有效的利用。本文重点介绍了目前主流的热氢化、冷氢化、氯氢化、等离子体氢化、催化氢化等五种四氯化硅氢化处理技术的工艺特点和研究进展,并对各种技术特点进行了评价。
Modified Siemens Process will produce a great of silicon tetrachloride in the process of producing polysilicon,if silicon tetrachloride can not be properly handled, it will adversely affect environment and productive cost of polysilicon, tt is effective for utilizing silicon tetrachloride to produce trichlorosilane by hydrogenation technology. Characteristic and researching progress of hydrogenation technology of silicon tetrachloride is introduced in detail.
出处
《四川化工》
CAS
2011年第1期13-17,共5页
Sichuan Chemical Industry
关键词
四氯化硅
氢化技术
进展
silicon tetrachloride
hydrogenation technology
researching progress
