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Structure and Tribological Properties of CrTiAlN Coatings Deposited by Multi-Arc Ion Plating 被引量:1

Structure and Tribological Properties of CrTiAlN Coatings Deposited by Multi-Arc Ion Plating
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摘要 CrTiAIN coatings were prepared by using a home-made industrial scale multi-arc ion plating system. The coatings were found to be composites of face-center-cubic CrN and TiN. The surface roughness, microhardness, and tribological properties of the films were significantly affected by the nitrogen pressure and dc-pulsed bias voltage applied to the substrate. The CrTiA1N coatings with the smoothest surfaces were obtained at optimum conditions of nitrogen pressure of 5.0 Pa and bias voltage of -200 V. The samples were found to exhibit a hardness of 2900 HV0.05 with an average friction coefficient of 0.16 and wear rate of 1.5× 10^-16 m^3/N.m against cemented carbide. CrTiAIN coatings were prepared by using a home-made industrial scale multi-arc ion plating system. The coatings were found to be composites of face-center-cubic CrN and TiN. The surface roughness, microhardness, and tribological properties of the films were significantly affected by the nitrogen pressure and dc-pulsed bias voltage applied to the substrate. The CrTiA1N coatings with the smoothest surfaces were obtained at optimum conditions of nitrogen pressure of 5.0 Pa and bias voltage of -200 V. The samples were found to exhibit a hardness of 2900 HV0.05 with an average friction coefficient of 0.16 and wear rate of 1.5× 10^-16 m^3/N.m against cemented carbide.
出处 《Plasma Science and Technology》 SCIE EI CAS CSCD 2011年第1期55-60,共6页 等离子体科学和技术(英文版)
基金 supported by the China Ministry of Industry and Information Technology (No. 2009ZX04012-032) Basic Research Fund of Central Universities
关键词 multi-arc ion plating CrTiAIN MICROHARDNESS surface morphology friction coellicient wear rate multi-arc ion plating, CrTiAIN, microhardness, surface morphology, friction coellicient, wear rate
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