摘要
分析了高端制造装备的国家重大需求和面临的发展机遇,讨论了现阶段高端数控机床和极大规模集成电路制造装备研发的主要任务,通过分析这两类高端制造装备的研究现状与发展趋势,总结出了高性能运动控制、高速高精度驱动、装备与工艺动态交互作用、精密加工的环境控制四方面的关键科学问题。
In this paper,the national requirements and development opportunities of the advanced manufacturing equipments are first analyzed.The major research and development works in advanced NC（Numerical Control） machine tools and very-large-scale integrated circuit equipments are then discussed.Based on the summarizations of the current states and development trends of these two types of manufacturing equipments,four scientific problems originated from the key techniques are presented.They cover high performance motion control,high-speed and high-precision driving,interaction mechanism between manufacturing process and machine tool,and environment control for high-precision manufacture.
出处
《机械制造与自动化》
2011年第1期1-5,共5页
Machine Building & Automation
关键词
高端制造装备
高端数控机床
大规模集成电路制造装备
发展趋势
科学问题
advanced manufacturing equipment
advanced NC machine tool
very-large-scale integrated circuit equipment
development trend
scientific problem
