摘要
定位误差是测高仪的主要误差源之一,为了提高测高仪的测量精度,研究了数字式测高仪定位误差的测量及补偿方法。以某公司生产的数字式测高仪为研究对象,以德国SIOS公司微型双平面镜干涉仪SP-D为高精度的标准量,实现了数字式测高仪定位误差的测量。采用二次多项式拟合的方法对测量数据进行曲线拟合,拟合前后的测量数据差值作为校正定位误差的偏差值,从而实现定位误差的补偿。实验结果表明,当测高仪滑座向上移动时,定位误差由0.009 3 mm减小到补偿后的0.004 6 mm,测高仪滑座向下移动时,定位误差由0.010 7 mm减小到补偿后的0.004 8 mm。
Positioning error is one of the main error sources in the height measuring instrument.In order to increase measurement accuracy,the measuring method and compensating process of positioning error in the digital height measuring instrument were studied.Based on a digital height measuring instrument,positioning error was measured by miniature double plane mirror interferometer SP-D of German SIOS corporation.The measurement results were fitted by quadratic polynomial fitting method.With the difference between the original data and the fitting data as the deviant of alignment positioning error,positioning error was compensated.The results of the experiment indicate that positioning error is reduced from 0.009 3 mm to 0.004 6 mm when slide of the height measuring instrument moves upward and positioning error is reduced from 0.010 7 mm to 0.004 8 mm when slide of the height measuring instrument moves downward.
出处
《机电工程》
CAS
2011年第2期141-143,共3页
Journal of Mechanical & Electrical Engineering
基金
国家自然科学基金资助项目(50627501)
关键词
测高仪
定位误差
激光干涉仪
height measuring instrument
positioning error
laser interferometer
