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高衍射效率金属介质膜光栅的设计及性能分析 被引量：2

Design and Analysis of High Efficiency Metal-Multi-layer Dielectric Grating
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摘要 基于严格耦合波理论,分析了金属介质膜光栅的衍射性能,以-1级衍射效率为评价函数,研究了表面浮雕结构分别为HfO2和Si O2材料的金属介质膜光栅,获得衍射效率优于99%的结构参数。数值计算表明,当顶层光栅结构为HfO2和Si O2的槽深分别为80nm和225 nm时,在1 053 nm处获得接近100%的衍射效率。 The diffraction characteristic of metal and multi-layer dielectric grating（MMDG） was analyzed with the method of rigorous coupled wave.Taking the-1 order diffraction efficiency above 99% as the merit function,the parameters of MMDG are optimized with the top layer being HfO2 and SiO2,respectively.Numerical calculation shows that the diffraction efficiency can be closed to 100% when the groove depths are 80 nm for HfO2 and 225 nm for SiO2 on the top surface.
作者 张文飞 孔伟金 云茂金 孙欣 梁健 席思星 王书浩
机构地区 青岛大学物理科学学院
出处 《青岛大学学报（自然科学版）》 CAS 2010年第4期41-45,共5页 Journal of Qingdao University(Natural Science Edition)
基金 国家自然科学基金项目(10804060 10904080) 山东省教育厅科技计划项目(J08LI05)
关键词 金属介质模光栅 耦合波 衍射效率 超短激光脉冲 metal-multi-layer dielectric grating coupled wave diffraction efficiency ultrashort laser pulse
分类号 O436 [机械工程—光学工程]
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参考文献7

  • 1孔伟金,范正修,邵建达.全电介质脉宽压缩光栅的研究进展[J].激光与光电子学进展,2005,42(1):32-36. 被引量：8
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二级参考文献16

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共引文献7

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青岛大学学报（自然科学版）
2010年 第4期

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