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一种新的光栅微位移测量方法的研究

A novel method of grating micrometric displacement measurement
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摘要 为了实现光栅莫尔条纹的精确计数和微位移的高精度测量,提出了一种新的莫尔条纹精确计数算法。当光栅移动时,通过CCD摄像器件将莫尔条纹转换为动态光电信号,即随时间变换的正弦信号。利用条纹周期性的能量分布曲线,对移动的莫尔条纹进行精确计数和判向,通过使用Matlab软件编辑界面,直观的显示光栅莫尔条纹移动个数及光栅微小位移。通过对莫尔条纹精确计数达到了对微小位移测量。实验结果表明,测量精度可以达到1μm. The Moire stripe was transformed to dynamic photo electricity signal by CCD image device,so the sinusoidal signal with the time going on is obtained.When the grating moved,the phase of sinusoidal signal was changed because of the pattern displacement.A novel Moire fringe counting algorithm is given in this paper.The paper proposed a theory that it can realize the precise count of Moire fringe.The algorithm makes full use of the energy distribution curve of stripes cyclical which is not only can count the moving Moire stripes,but also can distinguish the direction of stripe and the micrometric displacement of grating.The experiment results showed that the algorithm can reach the measurement accuracy of 1μm.
出处 《信息技术》 2010年第12期86-88,91,共4页 Information Technology
关键词 莫尔条纹 计数 位移测量 GUI界面 Moire stripe count displacement measurement GUI interface
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