摘要
简述了Al2O3系、MO-SiO2(M=Ca,Mg,Zn)系、MO-TiO2系等相对介电常数为6~30的低温共烧陶瓷(LTCC)的结构和微波介电性能,介绍了自主研发的Al2O3系和Mg5(Zn,Ti)4O15系材料制作的多层陶瓷电容器(MLCC)的电性能。分析和讨论了目前LTCC低介电常数微波介质陶瓷存在的问题,提出了其发展方向。
Microstructures and microwave dielectric properties of low temperature co-fired(LTCC) low permittivity microwave dielectric ceramics such as Al2O3,MO-SiO2(M=Ca,Mg,Zn)and MO-TiO2 based ceramics with εr between 6 and 30 are summarized.Combined with our own study,the electrical properties of multilayer ceramic capacitors(MLCC) made from Al2O3 and Mg5(Zn,Ti)4O15 system ceramics are analyzed and discussed,respectively.Additionally,existing problems and the future prospects of the LTCC low permittivity microwave dielectric ceramics are proposed.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2010年第12期64-67,共4页
Electronic Components And Materials
基金
粤港招标资助项目(No.2008A092000007-4)
关键词
微波介质陶瓷
低介电常数
综述
LTCC
介电性能
microwave dielectric ceramics
low permittivity
review
low temperature co-fired ceramic
dielectric property