摘要
对单晶硅微悬臂梁在高温环境下的动态特性进行了理论分析,研制了高温环境下的MEMS动态特性测试系统,采用压电陶瓷作为底座激励装置的驱动源,设计了一个可动的机构,解决了压电陶瓷在高温环境下使用的难题;通过激励装置进行冲击激励,使用激光多普勒测振仪对微悬臂梁的振动响应进行检测,对微悬臂梁受冲击后的时域信号进行分析,获得微悬臂梁的谐振频率。利用研制的高温环境下MEMS动态特性测试系统,在室温至300℃的温度环境下对单晶硅微悬臂梁的动态特性进行了测试,结果表明随着温度的升高其谐振频率会有轻微的减小,验证了理论分析的结果。
The dynamic characteristic of silicon micro-cantilever under high temperature was theoretical analyzed. A dynamic test system for MEMS in high temperature environment was developed. A base excitation device using piezoelectric ceramic as the driving source was also developed. A moveable mechanism is designed for the excitation device in high temperature environment, which solves the difficulty that piezoelectric ceramic is non-effective when the environment temperature is approaching the Curie point. Impulse excitation is carried out with the base excitation device, and the vibration response of the micro-cantilever is detected using a laser Doppler vibrometer. The resonance frequencies of the micro-cantilever are obtained through analyzing the impulse response signals. Dynamic characteristic test experiments for the silicon micro-cantilever were carried out in a temperature range from room temperature to 300℃. Test result shows that the resonance frequency slightly decreases with the increasing of temperature, which is consistent with the theoretical analysis.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2010年第11期2494-2499,共6页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金重点项目(50535030)
辽宁省自然科学基金(20062187)资助项目
关键词
MEMS测试
动态特性的测试
高温环境
微悬臂梁
激励装置
MEMS measurement
dynamic testing
high temperature environment
micro-cantilever
excitation device
