摘要
针对傅里叶变换轮廓术(Fourier transform profilometry,FTP)的实际应用,在介绍FTP的基本原理基础之上,提出了几种多频光栅的设计和实现方法,通过多频光栅的设计,旨在提高FTP的测量精度和速度。
This paper introduces Fourier transform profilometry (FTP) for practical application, in introducing the basic principles of FTP based on the proposed multi-frequency grating several design and implementation method, the design of multi-frequency grating to improve the measurement accuracy and speed FTP.
出处
《光学仪器》
2010年第5期44-48,共5页
Optical Instruments
基金
浙江大学第三届国家大学生创新性实验计划资助项目(2958)