摘要
利用ＭｏｎｔｅＣａｒｌｏ模型研究了薄膜生长初始阶段岛的形貌与基底温度之间的关系，同时还研究了它们与汽相粒子入射剩余能量之间的关系．模型中考虑了三种动力学过程：粒子入射、吸附粒子扩散和粒子脱附，与以前薄膜生长模型的不同之一在于把入射过程看作独立于其他过程，而扩散和脱附过程是相互关联的．结果表明随基底温度的升高，岛的形貌经历了一个从分散生长、分形生长到凝聚生长的变化过程．低温下随汽相粒子入射和剩余能量增加。
Abstract The relationship between temperature of substrate and
island morphology at the early phase of thin film growth has been investigated using Monte
Carlo model.The relationship between island morphology and rest energy of vapor phase
particles has also been obtained.Three kinds of dynamic processes,i.e.adsorption,diffusion and
desorption are considered.The difference between our model and the previous one is that the
impingement is considered to be independent of other processes,and the diffusion and
desorption are correlated with each other.The results indicate that with increasing
temperature,the island morphology evolves from dispersed growth,fractal growth to dense
growth.At low temperatures,with increasing energy of vapor phase particles,the same evolution
of island morphology is also observed.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
1999年第7期1302-1308,共7页
Acta Physica Sinica
基金
国家自然科学基金
