摘要
利用热阴极离子镀膜技术在硬质合金上制备CrNx薄膜。在400℃-800℃区间选取7个温度对试样进行氧化处理后,通过X射线衍射仪(XRD)、扫描电镜(SEM)、自动划痕仪、精密电子天平进行成分、结构及性能分析,研究其氧化过程和性能。结果表明:在700℃以下,CrNx薄膜具有良好的抗高温氧化性。
CrNx hard films could be prepared by hot cathode ion plating technology.After seven samples were oxidized under seven different temperatures from 400℃ to 800℃,the microstructure,composition and mechanics performance of the CrNx films were examined by XRD,SEM,scratch test and electronic precision balance for studying the oxidation processes and properties.The result showed that CrNx films played a good role for oxidation resistance at high temperature below 700℃.
出处
《西华大学学报（自然科学版）》
CAS
2010年第6期73-75,共3页
Journal of Xihua University:Natural Science Edition
基金
国家科技重大专项支持项目(2009ZX04012-23)
四川省特种材料及制备技术重点实验室经费资助
关键词
热阴极离子镀
CrNx
薄膜
抗高温氧化性
hot cathode ion plating
CrNx
hard films
oxidation resistance at high temperature
