摘要
讨论了工业硅粉中Fe、Al、Ca等杂质的含量对三氯氢硅合成系统的启动以及正常运行时的影响,并选择不同杂质含量的硅粉进行实验,以找到最适合三氯氢硅合成的生产工艺。
The effect of impurities such as Fe,Al,Ca,etc in industrial silicon powder on the synthesis of trichlorosilane and its operations were discussed,and the most suitable technology for synthesis of trichlorosilane was found when choosing different content of silicon powder.
出处
《有机硅材料》
CAS
2010年第6期377-379,共3页
Silicone Material
关键词
三氯氢硅
合成
工业硅粉
三氯化铝
trichlorosilane
synthetic
industrial silicon powder
aluminum chloride
