摘要
介绍了一种制作含有固体润滑剂的自润滑微电子机械的新方法。这种自润滑微电子机械克服了液体润滑剂在微电子机械中的副作用，能够有效地减少微电子机械接触面的微摩擦力和微电子机械的磨损，从而延长微电子机械的寿命。测试了以ＭｏＳ２作为固体润滑剂的Ｎｉ微电子机械的摩擦系数和磨损，结果显示加入ＭｏＳ２的微电子机械的摩擦系数与磨损仅为未加ＭｏＳ２同类微机械的２／３～１／２与１／１０～３／４。
The novel fabrication method of self lubrication MEMS( microelectromechanical System)with solid lubricant is reported.This self lubrication MEMS. could effectively reduce the micro friction force on the micromechanical surface and the erosion of the micromechanism,overcoming the by effects of the liquid lubricant in MEMS Thus the lifetime of MEMS is prolonged.The friction coefficient and erosion of Ni MEMS with MoS 2 as solid lubricnt are measured. The results show that the friction coefficient and erosion of MEMS with MoS 2 are equal to 2/3～1/2 and 1/10～3/4 of ones of MEMS without MoS 2,respectively.
出处
《微细加工技术》
1999年第2期47-51,34,共6页
Microfabrication Technology
