摘要
利用固相合成法,以未掺杂的熔融石英砂为基础原料,通过快速升温、短时保温的烧结工艺制备出了具有极低介电常数的熔融石英陶瓷材料。研究了不同烧结温度对材料的烧结特性及介电性能的影响。结果表明:在1 150℃烧结1 h制得的材料,具有较好的性能,其最大相对密度为99%,εr=3.4,tanδ=6.86×10–4(1 MHz),Q.f=12 000 GHz(10 GHz)。
Fused silica ceramics with lower permittivity were prepared by the solid phase synthesis method with fused silica sand as raw material.The sintering process used includes a rapid-heating stage and a short temperature-holding stage.The effects of sintering temperature on the sintering and dielectric properties of the ceramics were studied.The results show that the ceramics prepared after sintering at 1 150 ℃ for 1 h shows better performance in comparison to other samples.The maximum value of the relative density of this ceramic reaches 99%,while its permittivity εr,dielectric loss tanδ and Q.f are 3.4,6.86×10^–4（1 MHz） and 12 000 GHz,respectively.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2010年第11期12-14,共3页
Electronic Components And Materials
基金
四川省青年基金资助项目(No.JS0303001)
关键词
熔融石英陶瓷
烧结工艺
介电性能
fused silica ceramics
sintering process
dielectric property
