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激光全息法制备三维光子晶体的研究进展 被引量:4

PROGRESS ON FABRICATION OF THREE-DIMENSIONAL PHOTONIC CRYSTALS BY HOLOGRAPHIC LITHOGRAPHY
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摘要 三维光子晶体作为一种光子带隙材料,在光学器件、化学生物传感以及信息传输和存储等方面具有广泛的潜在应用价值。激光全息法制备光子晶体具有均匀性好、无缺陷、成本低廉等优点。综述了激光全息法制备三维光子晶体的理论及实验方面的研究进展,并阐述了各种方法的代表性工作以及各自的优缺点。 Three-dimensional photonic crystals, known as band gap materials, have broad potential applications in the area of optical devices, biochemical sensors, information transmission and storage, etc. Holographic lithography can produce photonic crystals with a strict uniformity and defect-free structure by using a simple setup through low cost process. Theoretical and experimental research progress in fabrication of three-dimensional photonic crystals by holographic lithography method was viewed. Representative examples of every method are given, and their advantages and shortcomings are evaluated.
出处 《真空与低温》 2010年第3期142-147,共6页 Vacuum and Cryogenics
关键词 光子晶体 三维 激光全息技术 photonic crystals three-dimension laser holographic lithography
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