摘要
描述了制作扫描近场光学显微镜光纤探针的两种简便有效的方法——带保护层的化学腐蚀法和光纤熔接机拉锥法，从实验中比较、分析了两种制作方法的优缺点，实验表明这两种方法均能制作出针尖直径为５０ｎｍ左右的光纤探针。
Two simple and effective methods chemically etching with a protective layer and optic fiber fusion splicer pulling,which are sued in making the optic fiber probe of the scanning nearfield optical microscope,are described in the paper.Both the advantages and disadvantages of these two methods have been compared and analyzed in the experiments.The experiments show that the optic fiber probe with 50nm or so needle point diameter can be fabricated with any method.
出处
《光电工程》
CAS
CSCD
1999年第2期20-24,共5页
Opto-Electronic Engineering
基金
国家自然科学基金
关键词
显微镜
光纤探针
近场光学
Scanning electron microscopes,Optical fibre probes,Near field optics.
