摘要
本文介绍在太阳电池生产线建设过程中,要以严谨的态度计算水、电、气等各种消耗量数据,结合作者实际经验并以N2为例,详细描述如何正确计算N2的平均消耗量。
paper expounds that in the solar cell production line construction process, the calculation of the consumption of water, electricity, air and others shall be done with rigorous attitude. Based on the author＇s actual experience and taking N2 as an example, this paper describes in detail how to correctly calculate average consumption of N2.
关键词
N2
清洗制绒
去磷硅玻璃(PSG)
扩散
刻蚀
甩干
PECVD
N2,Cleaning and etching, Removal of phosphorosilicate glass,Diffusion, The plasma-etching, Dryer, PECVD
