摘要
本文提出了基于马吕斯定律的偏振光直线位移传感器。对其检测原理与方法以及各主要构成环节进行了讨论。给出了使角度差与直线位移成正比的“同速差动”结构。介绍了消除光学系统非线性的线性化电路方案。此传感器具有光机电结合、量程大、灵敏度高、非接触传感等特点，为直线位移测量提供了新的方法与手段。
A new type of rectilinear displacement sensor based on optical Mains law is presented in this paper. Also, its measuring principle, method and construction are discussed. The mechanical structure which ensures that the angle difference of two polarizing filters is proportional to the displacement measured is given. And the circuit structure of correcting nonlinearity is introduced. The experimental results given in the paper have proved the correctness, feasibility and effectiveness of the new sensor system. The sensor has the characteristics of noncontact measurement, high sensitivity and simple structure. It deserves to be mentioned that the sensor is especially suitable to long-range displacement measurement.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1999年第3期221-224,共4页
Chinese Journal of Scientific Instrument
关键词
直线位移传感器
偏振光
马吕斯定律
位移测量
Rectilinear displacement sensor, polarized light detection, Mains law
