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Cu^+离子注入对ITO薄膜玻璃进行表面改性的研究 被引量:2

Study on Surface Modification of ITO-Coated Glass by Cu+ Ion-Implantation
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摘要 将透明导电氧化铟锡(ITO)薄膜玻璃注入了Cu+离子进行表面改性。利用四探针、分光光度计、红外反射等设备,测定了注入Cu+离子前后ITO薄膜玻璃的电学、光学、微波衰减和机械性能,得出它们性能的变化规律,并加以分析。结果表明,Cu+离子注入虽然使电学、光学性能有所降低,但表面硬度显著增加,可应用于对磨损性能要求较高的场合。 The surface modification of ITO-coated glass was studied by implanting Cu+ into ITO-coating. Using four-probe, spectrophotometer, IRRS etc., the electric and optical properties, microwave declination and mechanical properties before and after implantation were measured. The role of characteristic variation was deduced and analyzed. The results show that the electric and optical properties are inferior, but the surface hardness is improved obviously after Cu+ ion-implantation. It is suitable for the use where high abrasive resistance is demanded.
出处 《玻璃与搪瓷》 CAS 北大核心 1999年第3期18-21,43,共5页 Glass & Enamel
关键词 薄膜玻璃 离子注入 表面改性 ITO玻璃 ITO coated glass Ion implantation Surface modification
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