摘要
介绍了冷等离子体冶金效应的实验方法和结果，列出了反应粒子的输运方程，较详细地分析了它们之间的耦合关系．在讨论输运方程的求解过程中，证明各种粒子的输运速率是与提纯效果紧密相关的．提供了对硅的提纯结果和工艺参数。
The metallurgic effect in cold plasma is
introduced. The transport equation scoupled with the macro scopic trchnology parameters are
listed for the reaction particles. The analyses and calculation for the equations show that the
results can be used for getting the purity effects. The technology parameters and the purity results
for Si are provided, and the calculation result of transport rate for Cl is also given in this paper,
showing that this metallurgic effect could be used in the pruity of solar grade Si.
出处
《华中理工大学学报》
CSCD
北大核心
1999年第3期1-3,共3页
Journal of Huazhong University of Science and Technology
基金
国家自然科学基金
