摘要
利用射频反应溅射的方法在不同衬底温度（Ｔｓ）下制备了Ｃｏ－Ａｌ－Ｏ介质颗粒薄膜．薄膜的本征电阻及磁电阻值密切依赖于薄膜制备过程中的衬底温度．通过原子力显微镜对样品表面的观察发现：以Ｃｏ为基的纳米磁性颗粒的尺寸随Ｔｓ的增加而变大，并且颗粒之间由完全被介质分离逐渐变化到互相连接．对应这种结构上的变化，薄膜的电导机制由隧道效应向金属性电导转变，相应地薄膜的磁电阻值也发生了变化．
The tunnel type insulating granular films of Co Al O were prepared by rf reactive sputtering at various substrate temperatures ( T s ). Both resistivity and magnetoresistance were found to be closely dependent on T s . On the around that the Co rich granular size increased with T s , a simple model was given to elucidate the observed electrical and magnetic resistance variance with T s .
出处
《兰州大学学报（自然科学版）》
CAS
CSCD
北大核心
1999年第1期57-61,共5页
Journal of Lanzhou University(Natural Sciences)
基金
国家自然科学基金
关键词
薄膜
巨磁电阻效应
介质颗粒薄膜
纳米磁性颗粒
Co Al O insulating granular film
giant magnetoresistance
tunneling effect
microstructure
