摘要
本文介绍了两种光学镀膜真空淀积技术——离子辅助淀积和反应离子镀,并详述了近年来的应用及进一步的发展。
The present paper looks briefly at two types of advanced vacuum deposition technology in the field of optical coating, ion assisted deposition(IAD)and reactive ion plating(RIP); in the meanwhile, focusing on the application in recent years and their prospects.
关键词
光学薄膜
镀制
离子镀
淀积技术
Optical coatings
Optical thin films
Ion assisted deposition
Ion plating
