摘要
采用MOD工艺制备了PZT薄膜，利用XRD和TEM研究了焦绿石相向钙钛矿相的转变过程．制备在Pt／Ti／SiO2／Si衬底上的PZT薄膜，其XRD分析显示焦绿石相在600℃完全转变为钙钛矿相；与之相比，Pt箔上无支持的PZT薄膜，其TBM分析表明PZT焦绿石相完全转变为钙钛矿相的温度更高，且与薄膜的厚度有关．XPS研究表明，薄膜表面含有化学吸附氧和污染碳，无其它杂质存在.表面富含少量Pb，其Zr／Ti比与化学计量比一致，但晶格中缺氧．
PZT thin films were prepared by metallo-organic decomposition(MOD). Phase transformationfrom pyrochlore to perovskite was studied by XRD and TEM. XRD analysis showed that pyrochlorephase transformes into perovskite phase fully above 600℃ for the PZT thin films on Pt/Ti/SiO2/Sisubstrates. However, TEM results indicated, for the free-standing PZT thin films on Pt foilwith many microholes, that the transforming temperature from pyrochlore to perovskite is muchhigher, and the temperature is related to the thiCkness of thin films. The surfaCe states of MODderived PZT thin films were investigated by X-ray photoelectron spectroscopy(XPS) with wholeand narrow scanning measurement. The results showed that there are chemical-absorbed oxygenand contamination of carbon in the film surfaces which came from sample handling or pumpingoil. Other impurity could not be detected. The films have a little Ph-rich in the surface and astoichiometry of Zr/Ti ratio. However, the crystal lattice of the thin film is oxygen-deficiency.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1999年第1期119-126,共8页
Journal of Inorganic Materials
基金
国家自然科学基金!59582011
