摘要
文章在全面考虑横向和纵向灵敏度系数对压力传感器线性度影响的基础上，给出了圆平膜片压力传感器在两种薄膜应变片基本布置方式下传感器灵敏度的实用计算公式。虽形式上比较复杂，但计算结果更接近薄膜压力传感器的实际情况，适合于用来对敏感膜片进行线性度的优化设计。
The effect of the crosswise and lengthwise sensitivity coefficients on the linearity of the pressure transducer is taken into account in some paper. On the basis of the practical formula used for calculating the linearity of transducers have been given the flat - diaphragm thin - film pressure transducer in the basic arrange way of two kinds of thin - film stain gages. Though it is complicated in form, the result is closely related to the flat - diaphragm thin -film pressure transducer and is fitted for designing the linearity of the sensitive diaphragm.
出处
《微电子学与计算机》
CSCD
北大核心
1999年第2期14-17,共4页
Microelectronics & Computer
