摘要
报道了采用红外椭圆偏振光谱术测量ＧａＡｓ体材料折射率，测量范围为２．５～１２．５μｍ，并将所得实验数据与理论计算和其它实验结果进行了对比，表明了实验结果的可靠性．
The refractive index of GaAs bulk material was studied using infrared spectroscopic ellipsometer (2.5￣12.5μm).Comparisons with data obtained by other methods were also presented, showing good agreement between them.
出处
《红外与毫米波学报》
SCIE
EI
CAS
CSCD
北大核心
1999年第1期23-25,共3页
Journal of Infrared and Millimeter Waves
基金
国家自然科学基金
关键词
红外
椭圆偏振光谱
折射率
体材料
砷化镓
infrared ellipsometric spectroscopy, refractive index, GaAs bulk material.
