摘要
针对一些特殊材料表面形貌的检测需要 ,在原有国产商用激光检测原子力显微镜的基础上 ,设计研制了适用性更广、功能更强的原子显微镜。在不提高驱动电压的前提下 ,采用改进的扫描管 ,将扫描范围从 15μm× 15μm提高到了 50 μm× 50 μm ;改进了原有的微探针扫描模式 ,在探针上施加一驱动的简谐振荡信号 ,使探针发生振荡。由于存在着表面的力梯度 ,当样品与探针距离发生振荡变化时 ,针尖振荡的振幅、频率和位相都会随之改变。用电子信号反馈电路探测此变化 。
A new detection head was developed,which provides additional oscillation operation mode and wider applications for the atom force microscopes manufactured in Benyuan Micro instrument Developing Center.The oscillation of the cantilever with a tip fixed onto a bimorph piezo can be achieved by connecting a signal generator.When the tip sample separation oscillates,its amplitude,its resonance frequency and its phase may vary because of the surface force gradient.The sample surface topography can be characterized by detecting the phase shift or the changes in the amplitude and in the resonance frequency.An elongated piezo scanner tube was used to expand the original scanning range from 15 μm by 15 μm to 50 μm by 50 μm with the electronic feedback controlling unit unchanged.
出处
《真空科学与技术》
CSCD
北大核心
1999年第1期1-5,共5页
Vacuum Science and Technology
关键词
扫描隧道显微镜
原子力显微镜
振荡模式
激光
Scanning tunneling microscopy,Atomic force microscopy,Oscillation mode
