摘要
在双频激光干涉测量系统中，Wollaston棱镜是不可缺少的重要光学元件，它可将双频激光按偏振方向分为测量光和参考光，从而实现高精度测量；但是，如果Wollaston棱镜的安装方位相对入射光线方向以及与聚焦透镜距离不同时，测量结果将会不同。本文结合表面粗糙度激光测量系统，从理论上定量分析了Wollaston棱镜的安装方位对测量精度的影响。
In dual-frequency laser interference measuring system Wollaston prism is anindispensable and important device,which can separate the incident beam in to measurement beam andreference beam according to the polarization direction of dual-frequency laser,so as to realize the highaccuracy measurement. But if the installation orentation of Wollaston prism relative to the incident beamand the distance between the prism and the focus lens are different. The measurement result will bedifferent. In this paper,combining with the surface roughness laser measuring system,the influence ofthe orientation of Wollaston prism on accuracy of measurement is analyzed in theory and quantitatively.
出处
《航空计测技术》
1999年第1期4-7,共4页
Aviation Metrology & Measurement Technology
