摘要
该微动平台采用花岗岩作为机架材料,以压电陶瓷直线电机驱动平台,选择RENISHAW的RGH25光栅作为反馈和宏微双驱动协调控制伺服输出,并提出了提高定位精度的方案。为研究微动工作台提供了参考。通过实验对工作台的性能进行分析,证实平台设计的可行性。
The micro-motion stage,its framework made of granite,is driven by piezoelectric ceramic linear motor.RGH25 of RENISHAW gratings have been chosen to provide feedbacks and serve as either macro-drive or micro-drive,put forward a program to improve positioning accuracy.This provides reference for the research on micro-motion platform.Finally a performance test has been carried out to confirm the feasibility of the stage.
出处
《机械设计与制造》
北大核心
2010年第6期130-131,共2页
Machinery Design & Manufacture
基金
浙江省教育厅科研项目(Y200803309)
辽宁省教育厅自然科学基金资助项目(20060633)
关键词
压电陶瓷
微定位平台
宏微双驱动
Piezoelectric ceramic
Micro-positioning stage
Macro-micro dual drive
