摘要
建立了电感耦合等离子体源的电磁场模型、电离模型和双极扩散模型，并进行模拟计算。计算结果表明，在天线结构和反应室内径不变的情况下，随着反应室高度的下降，电场强度逐渐升高，电子密度也升高。反应室高度从１２ｃｍ降到５ｃｍ时，峰值电子密度增加６０％。
In this paper ,electromagnetic field model ,ionization model and an ambipolar diffusion model are established for inductively coupled plasma source (ICPS )and the models are calculated .The results show that when an antenna geometry and inner radial of the reactor is constant ,the field intensity and electron number density increases with the height decreases .When the height of reactor decreases from 12 cm to 5 cm, the peak electron concentration increased by 60 percent.
出处
《真空与低温》
1999年第1期26-31,共6页
Vacuum and Cryogenics
基金
国家自然科学基金
广东省自然科学基金
