摘要
介绍了一种以四极质谱计为核心的适合在常压下检漏的多种示漏气体分析仪的结构、工作原理、设计方案、试验方法、试验结果。该仪器具有在大气压下检测Ｈｅ浓度为１×１０－９、Ｎｅ浓度为２×１０－７、ＣＦ４浓度为１×１０－９的能力。
This paper describes the structure, working theory, design scheme, experiment method and experiment results of a multiple showing gas leak detection equipment consisting mainly of quadrupole mass spectrum, which s suitable for leak detecting in atmosphere.It can detrct He at the concentration of 1×10 -9 ,Ne at the concentration of 2×10 -7 ,and CF 4 at the concentration of 1×10 -9 .
出处
《真空与低温》
1999年第1期4-9,共6页
Vacuum and Cryogenics
关键词
检漏
常压
四极质谱计
气体分析仪
leak detecting atmosphere qurdrupole mass spectrum
