摘要
介绍了通用电容读取芯片MS3110的内部结构、基本原理及其使用方法,提出了采用单片机实现片内EEPROM编程的方法,并给出了读写控制框图。以梳齿式硅微传感器为敏感元件,采用滞后比例积分调节器,基于MS3110通用电容读取芯片设计了一种MEMS力平衡闭环加速度计。实验结果表明:设计的MEMS加速度计能够闭环正常工作并取得了一定的性能。
MS3110 is a universal capacitive readout （UCR） integrated circuit （IC）. In this paper, its configuration, operating principle and usage are introduced. A method of programming the EEPROM on-chip with single chip microcomputer is presented with the chief writing and reading control block diagram. Based on the UCR IC, a new MEMS accelerometer with multi-finger micro-machined sensor is designed, in which force-rebalanced with lag proportional-integral controller is applied to implement the closed-loop system. The measurement result shows that this accelerometer can work under closed-loop condition and obtain improved performances.
出处
《中国惯性技术学报》
EI
CSCD
北大核心
2010年第2期236-239,共4页
Journal of Chinese Inertial Technology
基金
国家十一五预研基金资助项目(51308050208)
