摘要
通过三项试验,找到了CCD摄像机组件靶面脏斑形成的原因。潮湿的自然环境、温度变化和运输振动三个因素促成CCD组件机壳内的水汽吸附灰尘,凝聚到芯片靶面上形成脏斑。提出了解决脏斑问题的具体方法。通过在CCD组件的装配、包装过程中采取针对性措施来保证密封性能,这样就能在存储和运输过程中避开空气中的灰尘、水汽等脏斑源,靶面上就不会因受潮而产生脏斑。采取这些措施后,在后续产品中脏斑问题得到了彻底解决。
Through three tests, the causes of the spots formation on the target surface of CCD camera components are analyzed. It is found that three factors of damp environments, temperature changes and transport vibrations make the water vapour within CCD components absorb dust and then condensate on the target surface to form dirty spots. Specific solutions for solving this problem are proposed. Appropriate measures can be taken to ensure the sealing performance, then such sources of dust or water vapour in the air can be avoided in the process of storage and transportation. Then spots will not form on the target surface. After taking these measures, the spot problem do not happen in the follow-up products.
出处
《半导体光电》
CAS
CSCD
北大核心
2010年第2期260-262,共3页
Semiconductor Optoelectronics
关键词
CCD
脏斑
试验
CCD
dirty spot
experiment
