摘要
由干涉滤光片的透过率解算激光的入射角,以特定波长附近长波段的垂直透射光谱特性为参照,针对1064nm激光,设计并实现了一种透过率差与偏振无关且随入射角近似线性下降的干涉滤光片组合,在0°～60°入射角范围内,由入射光的偏振性引起的透过率差的波动量小于±1.9%,非偏振光对应的透过率差ΔT与入射角θ之间的线性关系为ΔT=-1.11θ+62.17,非线性误差为12.6%;当ΔT的测量精度为±1.414%时,对应的入射角平均解算精度为±3.2°。
when the vertical transmitted spectrum is consulted in long-wave band near a special wavelength, a combined interference filter with transmission ratio difference unrelated to polarization and approximate linear relation to incident angle is designed and implemented against 1064nm, to resolve laser incident angle from transmission ratio of interference filter. When the incident angle is under the range of 0°-60°,the fluctuation quantity caused by polarization of incident laser is smaller than ±1.9% , while corresponding to non-polarized light, the linear relation of transmission ratio difference and incident angle is ΔT=-1.11θ＋ 62.17 and the nonlinear error is 12.6%. When the measurement accuracy of transmission ratio difference is 1.414%, the mean resolving accuracy of incident angle is ±3.2°.
出处
《半导体光电》
CAS
CSCD
北大核心
2010年第2期190-193,198,共5页
Semiconductor Optoelectronics
关键词
干涉滤光片
透过率差
偏振性
入射角
interference filter
transmission ratio difference
polarization character
incident angle
