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多孔SnO_2薄膜的导电和气敏特性 被引量：3

Condutive and Gas Senstive Properties of Porous Tin Oxide Thin Films
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摘要 用RGTO方法制备多孔、颗粒状SnO2薄膜；根据SEM观察结果建立简单导电模型，并验证其导电机制主要是晶界导电；研究纯SnO2薄膜及掺杂SnO2薄膜对CO，乙醇等气体的气敏特性。掺Pt的薄膜对CO有很好的气敏响应；选择合适工作温度，可提高灵敏度改善选择性，用此种方法制得的薄膜具有良好的长期稳定性、非常短的响应和恢复时间等特点。 The porous SnO2 thin films were prepared by the RGTO (rheotaxial growth and thermal oxidation) technique. Their stricture was stuudied with SEM and the gas sensitive properties for the films and Pt doped films were also investigaed. The SEM observations revealed that the highly porous films consist of a large number of SnO2 grains. We propose that the grain boundaries is mainly responsible for conduction. The results showed that the Pt doped film is more sensitive to CO and that the sensitivity and the selectivity may improve at an optimized temperature. It was also found that the films can be very stable in a long period of time with fairly short response and recovery time,which are important in practical applications.
作者 王悦 李建平 韩泾鸿 付秉相
机构地区 中国科学院电子学研究所传感技术国家重点实验室
出处 《真空科学与技术》 CSCD 北大核心 1998年第4期272-275,共4页 Vacuum Science and Technology
基金 传感技术国家重点实验室基金 国家自然科学基金
关键词 薄膜传感器 多孔薄膜 导电 气敏特性 二氧化锡 Tin oxide thin film sensor, Porous thin film, Graim boundary conduction, Gas sensitive property
分类号 TN304.21 [电子电信—物理电子学] O484.4 [理学—固体物理]
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参考文献9

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同被引文献38

  • 1Sberveglieri G,Faflia G,Groppelli S,et al.RGTO:A New Technique for Preparing SnO2 Sputtered Thin Films as Gas Sensors[C].San Francisco,CA,USA:Proc 6th Int Conf Solid-state Sensors and Actuators (Trandducers"91),1991.165-168.
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  • 9Elisabetta Comini,Luca Ottini,Guido Faglia,et al.SnO2 RGTO UV activation for CO monitoring[J].IEEE Sens J,2004,4(1):17-20.
  • 10Die'guez A,Romano-Rodr'lguez A,Morante J R,et al.Influence of the completion of oxidation on the long-term response of RGTO SnO2 gas sensors[J].Sens Actuat,2000,B66:40-42.

引证文献3

真空科学与技术
1998年 第4期

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