摘要
采用热敏纸和量热计作为诊断手段，研究了同轴等离子体枪产生的脉冲高能量密度等离子体的空间分布及其对材料表面改性的影响。结果表明，在一定的轴向距离内，等离子体束呈现轴对称截面分布，其沉积能量密度在（1．3～5）×104J／m2之间。为获得较好的表面改性结果，要求等离子体束的沉积能量密度在（2～2．5）×104J／m2范围内，并在束截面内均匀分布。同轴枪电极结构及放电电压等均对等离子体束的能量密度及其分布具有明显影响，因此可通过改变同轴枪参数，以获得所需的等离子体条件。
The spotial distribution and its influence on surface modification of the high energy density pulsed hot plasmas, generated by the coaxial plasma gun have been investigated with thermal paper and carolimeter as di-agnostics The results show that, within a certain axial distance from the nozzle, the plasma beam has a symmetri-cal distribution around the axis in the cross-sectional plane at the deposited energy-density (1 .3-5) ×104 J/m2.It is found that, to obtain better results of surface modifications, the plasma beam is required to be uniformely dis-tributed in cross-sectional plane at the deposited energy-density (2-2. 5) ×104 J/m2 The coaxial electrode struc-tures and the discharge voltage of the coaxial gun are also found to notably influence the plasma distribution. Opti-mitzed plasma conditions can be obtained by adjusting the coaxial gun parameters.
出处
《真空科学与技术》
CSCD
北大核心
1998年第5期340-344,共5页
Vacuum Science and Technology
基金
国家自然科学基金
关键词
高能量密度
等离子体
表面改性
电极结构
High energy density plasma, Surface modification, Electrode structure,Dischange voltage
