摘要
研究计算机硬盘磁头滑块承载面结构的设计理论与加工方法。分析了现有磁头滑块的结构特点及其设计理论和设计方法;利用光刻及干法刻蚀的工艺及设备,进行了所设计磁头滑块的微加工;并利用三维表面形貌测量仪对所加工的磁头进行了加工质量分析,给出实验测量值与设计值的比较结果。
The methods of design and fabrication of head sliders are discussed in this paper. The structures and design methods of head sliders are analysed,and the micro-fabrication of a head slider has been completed in term of the methods and equipment of lithography and dry etching. 3D surface microstructures of the head slider fabricated with the dry etching are measured on a Vecco MHT-III interferometer,and the analysis results are shown.
出处
《机械设计》
CSCD
北大核心
2010年第4期68-71,共4页
Journal of Machine Design
基金
北京市自然科学基金资助项目(3082009)
