摘要
以硅作为基底材料,采用深反应离子刻蚀(DRIE)技术加工出含有新型锯齿流道和传统锥形管的微泵,整个微泵结构为聚二甲基硅氧烷(PDMS)-玻璃-硅-PDMS式.采用阳极键合方法对硅和玻璃之间进行封装.PDMS和玻璃、PDMS和硅之间的封装采用紫外线照射方法,使PDMS表面改性,从而达到不可逆密封.分别对两种微泵在不同电压、频率以及波形驱动下的最大流量(MFR)和最大压力头(MPH)进行测试与比较,发现在固定频率下,两个微泵的最大流量和最大压力头均随驱动电压升高而升高,并且正弦波驱动下的效果要好于其他两种驱动波形;在固定电压下,最大流量随着频率升高在60Hz和200Hz两个频率点同时达到最大,最大压力头则在60～600Hz内一直处于最大值不变;锯齿流道微泵的最大流量和最大压力头明显高于传统锥形微泵.由于流道侧面环形面积的存在增加了流通面积,新形锯齿形流道微泵的效率明显高于传统锥形管微泵.
The micropumps were fabricated by using deep reactive ion etching（DRIE）technology on silicon wafer to have the structure of the novel saw-tooth microchannels and the traditional diffuser microchannels.The whole structure of the micropump is polydimethylsiloxane（PDMS）-glass-silicon-PDMS.The sealing between the silicon and the glass wafer was carried out by anodic bonding technology.The irreversible sealing between the PDMS and glass,the silicon and PDMS were adopted by UV irradiation through the characteristic change of the PDMS surface.Moreover,the maximum pressure head（MPH）and the maximum flow rate（MFR）of the two micropumps were tested with different driving voltages,frequencies and signals.The comparison results show that the MPH and MFR values increase along with the driving voltage under the condition of the same frequency,and the effects of the sine wave driving are prior to those of other waves.Under the condition of the same voltage,the MFR simultaneously reaches the maximum values at 60 Hz and 200 Hz along with the increase of the frequency,whereas the MPH keeps the maximum value ranged from 60 Hz to 600 Hz all along.The performance of the micropump with the novel saw-tooth microchannels was enhanced greatly compared with the traditional diffuser micropump.We attribute the greater efficiency of the saw-tooth micropump compared with the traditional diffuser micropump to the existence of the vortex areas which increase the circulating areas.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2010年第2期149-155,共7页
Nanotechnology and Precision Engineering
基金
国家教育部高等学校博士学科点专项科研基金资助项目(20050280015)
关键词
深反应离子刻蚀
锯齿流道
压电微泵
性能
效率
deep reactive ion etching
saw-tooth microchannel
piezoelectric micropump
performance
efficiency
